SpotOn Compact-激光光束定位仪

高精度紧凑型光束定位系统。不需要歧管箱。传感器头内置电子元件。测量位置和功率，可使用双轴横向效应探测器（分辨率降至0.1um@50Hz数字滤波器，+/-6um绝对精度）或四象限探测器（精度降至波束直径的+/-0.025%）。

规格

Detector	L – Lateral Effect	L04	Q – Four Quadrant
Size	9 x 9 mm	4 x 4 mm	10 x 10 mm
Type	Dual axis Si, No glass cover	Dual axis Si, No glass cover	4x Si sectors seperated by 30 μm gap, No glass cover
Usable beam size	⌀50μm to ⌀9 mm	⌀50μm to ⌀4 mm	⌀50μm to ⌀5 mm
Position measurement range	⌀9 mm	⌀4 mm	One beam radius up to ±2.5 mm
Position resolution	Down to 0.1 μm at 50 Hz digital filter plus averaging	Down to 0.1 μm at 50 Hz digital filter plus averaging	Down to 0.25% of beam size
Position accuracy	±12.5 μm over 9 mm dia.	±6 μm over 4 mm dia.	±1μm or ±0.025% of beam size
Update rate	Max. 150 Hz at 500 Hz digital filters
Operational Spectral range	350 – 1100 nm
Power range	10 μW to 10 mW with attenuating ND filters
Power accuracy (*)	±5%